Invention Grant
- Patent Title: Nonvolatile memory cell and method for fabricating the same
- Patent Title (中): 非易失性存储单元及其制造方法
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Application No.: US12604757Application Date: 2009-10-23
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Publication No.: US09281202B2Publication Date: 2016-03-08
- Inventor: Tae-Ho Choi , Jung-Hwan Lee , Heung-Gee Hong , Jeong-Ho Cho , Min-Wan Choo , Il-Seok Han
- Applicant: Tae-Ho Choi , Jung-Hwan Lee , Heung-Gee Hong , Jeong-Ho Cho , Min-Wan Choo , Il-Seok Han
- Applicant Address: KR Cheongju-si
- Assignee: MagnaChip Semiconductor, Ltd.
- Current Assignee: MagnaChip Semiconductor, Ltd.
- Current Assignee Address: KR Cheongju-si
- Agency: NSIP Law
- Priority: KR2009-0011908 20090213
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L21/28 ; H01L29/51 ; H01L29/66 ; H01L29/788

Abstract:
A nonvolatile memory cell and a method for fabricating the same can secure stable operational reliability as well as reducing a cell size. The nonvolatile memory cell includes a drain region formed in a substrate, a source region formed in the substrate to be separated from the drain region, a floating gate formed over the substrate between the drain region and the source region, a halo region formed in the substrate in a direction that the drain region is formed, a dielectric layer formed on sidewalls of the floating gate, and a control gate formed over the dielectric layer to overlap with at least one sidewall of the floating gate.
Public/Granted literature
- US20100270605A1 NONVOLATILE MEMORY CELL AND METHOD FOR FABRICATING THE SAME Public/Granted day:2010-10-28
Information query
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