Invention Grant
- Patent Title: Electromechanical transducer and method for manufacturing the same which suppresses lowering of sensitivity while a protective layer is formed
- Patent Title (中): 机电换能器及其制造方法，其在形成保护层时抑制灵敏度的降低
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Application No.: US13794412Application Date: 2013-03-11
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Publication No.: US09282415B2Publication Date: 2016-03-08
- Inventor: Chienliu Chang
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Canon USA, Inc. IP Division
- Priority: JP2008-295799 20081119
- Main IPC: B81B3/00
- IPC: B81B3/00 ; B06B1/02 ; H04R19/00 ; H04R31/00 ; B81C1/00
Abstract:
An electromechanical transducer of the present invention includes a first electrode, a vibrating membrane formed above the first electrode through a gap, a second electrode formed on the vibrating membrane, and an insulating protective layer formed on a surface of the second electrode side. A region where the protective layer is not formed is present on at least part of a surface of the vibrating membrane.
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