发明授权
US09284207B2 Method of manufacturing granulated silica powder, method of manufacturing vitreous silica crucible 有权
造粒二氧化硅粉末的制造方法,石英坩埚的制造方法

Method of manufacturing granulated silica powder, method of manufacturing vitreous silica crucible
摘要:
The present invention provides a method of manufacturing a vitreous silica crucible having a transparent layer by use of waste vitreous silica, and silica powder suitable for the manufacturing. According to the present invention, there is provided a method of manufacturing granulated silica powder comprising a process for pulverizing waste vitreous silica generated in the manufacturing process of a crucible to form silica fine powder having an average particle diameter of 100 μm or less, and a process for granulating the silica fine powder to obtain granulated silica powder having an average particle diameter of 50 μm or more under helium atmosphere.
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