Invention Grant
- Patent Title: Multiple beam combiner for laser processing apparatus
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Application No.: US14594890Application Date: 2015-01-12
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Publication No.: US09285595B2Publication Date: 2016-03-15
- Inventor: Stephen Moffatt , Douglas E. Holmgren , Samuel C. Howells , Edric Tong , Bruce E. Adams , Jiping Li , Aaron Muir Hunter
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, LLP
- Main IPC: G02B27/12
- IPC: G02B27/12 ; G02B27/10 ; G02B27/14 ; G02B17/08

Abstract:
Apparatus and methods for combining beams of amplified radiation are disclosed. A beam combiner has a collimating optic positioned to receive a plurality of coherent radiation beams at a constant angle of incidence with respect to an optical axis of the collimating optic. The respective angles of incidence may also be different in some embodiments. The collimating optic has an optical property that collimates the beams. The optical property may be refractive or reflective, or a combination thereof. A collecting optic may also be provided to direct the plurality of beams to the collimating optic. The beam combiner may be used in a thermal processing apparatus to combine more than two beams of coherent amplified radiation, such as lasers, into a single beam.
Public/Granted literature
- US20150124329A1 MULTIPLE BEAM COMBINER FOR LASER PROCESSING APPARATUS Public/Granted day:2015-05-07
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