Invention Grant
US09287178B2 Multi-gate field effect transistor (FET) including isolated fin body
有权
多栅极场效应晶体管(FET)包括隔离鳍体
- Patent Title: Multi-gate field effect transistor (FET) including isolated fin body
- Patent Title (中): 多栅极场效应晶体管(FET)包括隔离鳍体
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Application No.: US13632237Application Date: 2012-10-01
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Publication No.: US09287178B2Publication Date: 2016-03-15
- Inventor: Hongmei Li , Junjun Li
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent Michael Le Strange
- Main IPC: H01L21/20
- IPC: H01L21/20 ; H01L21/8234 ; H01L27/088 ; H01L29/66 ; H01L29/78

Abstract:
Aspects of the disclosure provide a multi-gate field effect transistor (FET) formed on a bulk substrate that includes an isolated fin and methods of forming the same. In one embodiment, the multi-gate FET includes: a plurality of silicon fin structures formed on the bulk substrate, each silicon fin structure including a body region, a source region, and a drain region; wherein a bottom portion the body region of each silicon fin structure includes a tipped shape to isolate the body region from the bulk substrate, and wherein the plurality of silicon fin structures are attached to the bulk substrate via at least a portion of the source region, or at least a portion of the drain region, or both.
Public/Granted literature
- US20140091394A1 MULTI-GATE FIELD EFFECT TRANSISTOR (FET) INCLUDING ISOLATED FIN BODY Public/Granted day:2014-04-03
Information query
IPC分类: