Invention Grant
US09287180B2 Integrated circuits having finFETs with improved doped channel regions and methods for fabricating same
有权
具有具有改进的掺杂沟道区的finFET的集成电路及其制造方法
- Patent Title: Integrated circuits having finFETs with improved doped channel regions and methods for fabricating same
- Patent Title (中): 具有具有改进的掺杂沟道区的finFET的集成电路及其制造方法
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Application No.: US14749245Application Date: 2015-06-24
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Publication No.: US09287180B2Publication Date: 2016-03-15
- Inventor: Jinping Liu , Bharat Krishnan , Bongki Lee , Vidmantas Sargunas , Weihua Tong , Seung Kim
- Applicant: GLOBALFOUNDRIES, Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES, INC.
- Current Assignee: GLOBALFOUNDRIES, INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Ingrassia Fisher & Lorenz, P.C.
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L29/66 ; H01L29/78

Abstract:
Methods for fabricating integrated circuits are provided. In an embodiment, a method for fabricating an integrated circuit includes forming a first fin structure overlying a first type region in a semiconductor substrate and forming a second fin structure overlying a second type region in the semiconductor substrate. A gate is formed overlying each fin structure and defines a channel region in each fin structure. The method includes masking the second type region and etching the first fin structure around the gate in the first fin structure to expose the channel region in the first fin structure. Further, the method includes doping the channel region in the first fin structure, and forming source/drain regions of the first fin structure around the channel region in the first fin structure.
Public/Granted literature
- US20150294915A1 INTEGRATED CIRCUITS HAVING FINFETS WITH IMPROVED DOPED CHANNEL REGIONS AND METHODS FOR FABRICATING SAME Public/Granted day:2015-10-15
Information query
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