发明授权
- 专利标题: Devices, systems, and methods for ion trapping
- 专利标题(中): 用于离子捕获的设备,系统和方法
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申请号: US14686576申请日: 2015-04-14
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公开(公告)号: US09287348B1公开(公告)日: 2016-03-15
- 发明人: Daniel Youngner
- 申请人: Honeywell International Inc.
- 申请人地址: US NJ Morristown
- 专利权人: Honeywell International Inc.
- 当前专利权人: Honeywell International Inc.
- 当前专利权人地址: US NJ Morristown
- 代理机构: Brooks, Cameron & Huebsch, PLLC
- 主分类号: H01L23/04
- IPC分类号: H01L23/04 ; H01L49/02 ; H01L23/48
摘要:
Devices, methods, and systems for ion trapping are described herein. One device includes a through-silicon via (TSV) and a trench capacitor formed around the TSV.
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