Invention Grant
- Patent Title: Integrated circuits with dual silicide contacts and methods for fabricating same
- Patent Title (中): 具有双硅化物触点的集成电路及其制造方法
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Application No.: US14167778Application Date: 2014-01-29
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Publication No.: US09293462B2Publication Date: 2016-03-22
- Inventor: Shao Ming Koh , Guillaume Bouche , Jeremy A. Wahl , Andy C. Wei
- Applicant: GLOBALFOUNDRIES, Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES, INC.
- Current Assignee: GLOBALFOUNDRIES, INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Ingrassia Fisher & Lorenz, P.C.
- Main IPC: H01L21/4763
- IPC: H01L21/4763 ; H01L27/092 ; H01L21/311 ; H01L29/45 ; H01L21/8238 ; H01L29/16 ; H01L29/167 ; H01L29/161

Abstract:
Integrated circuits having silicide contacts with reduced contact resistance and methods for fabricating integrated circuits having silicide contacts with reduced contact resistance are provided. In an embodiment, a method for fabricating an integrated circuit includes providing a semiconductor substrate having selected source/drain regions and non-selected source/drain regions. The method forms a contact resistance modulation material over the selected source/drain regions. Further, the method forms a metal layer over the selected and non-selected source/drain regions. The method includes annealing the metal layer to form silicide contacts on the selected and non-selected source/drain regions.
Public/Granted literature
- US20150214228A1 IINTEGRATED CIRCUITS WITH DUAL SILICIDE CONTACTS AND METHODS FOR FABRICATING SAME Public/Granted day:2015-07-30
Information query
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