发明授权
US09297863B2 Planarized three-dimensional (3D) magnetic sensor chip 有权
平面化三维(3D)磁传感器芯片

Planarized three-dimensional (3D) magnetic sensor chip
摘要:
A planarized 3-dimensional magnetic sensor chip includes a first magnetic sensing device, a second magnetic sensing device, a third magnetic sensing device and a magnetic flux bending concentrating structure on a circuit chip substrate, wherein the first magnetic sensing device and the second magnetic sensing device are used to measure the magnitude of flux in a first direction and a third direction together, and the third magnetic sensing device is used to measure the magnitude of flux in a second direction, the magnetic flux bending concentrating structure is used to bend the magnitude of flux in the third direction to the first direction, such that the magnitude of flux in the third direction can be measured by first magnetic sensing device and the second magnetic sensing device in the first direction.
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