发明授权
- 专利标题： Method of patterning self-assembled monolayer on slider
- 专利标题（中）： 滑块上自组装单层图案的方法
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申请号： US14810864申请日： 2015-07-28
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公开(公告)号： US09299376B1公开(公告)日： 2016-03-29
- 发明人: Robert Anthony Fernandez , David James Ellison , Daniel Richard Buettner
- 申请人： Seagate Technology LLC
- 申请人地址： US CA Cupertino
- 专利权人： SEAGATE TECHNOLOGY LLC
- 当前专利权人： SEAGATE TECHNOLOGY LLC
- 当前专利权人地址： US CA Cupertino
- 代理机构： HolzerIPLaw, PC
- 主分类号： G11B5/60
- IPC分类号： G11B5/60
摘要：
Methods for providing a SAM (self-assembled monolayer) coating on a slider and subsequently removing a portion of the SAM coating. In one implementation, the method includes applying a SAM coating on at least a first surface of a slider and on a second surface of the slider opposite the first surface, and removing at least a portion of the SAM coating from the second surface by irradiating the second surface with UV radiation in a wavelength range of 100-200 nm.
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