- 专利标题: Micromagnetic device and method of forming the same
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申请号: US14105461申请日: 2013-12-13
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公开(公告)号: US09299489B2公开(公告)日: 2016-03-29
- 发明人: Ashraf W. Lotfi , Trifon M. Liakopoulos , Robert W. Filas , Amrit Panda
- 申请人: Enpirion Inc.
- 申请人地址: US NJ Hampton
- 专利权人: Enpirion, Inc.
- 当前专利权人: Enpirion, Inc.
- 当前专利权人地址: US NJ Hampton
- 代理机构: Boisbrun Hofman, PLLC
- 主分类号: H01F5/00
- IPC分类号: H01F5/00 ; H01F27/28 ; H01F17/00 ; H01F41/04 ; H01F27/245
摘要:
A micromagnetic device includes a first insulating layer formed above a substrate, a first seed layer formed above the first insulating layer, a first conductive winding layer selectively formed above the first seed layer, and a second insulating layer formed above the first conductive winding layer. The micromagnetic device also includes a first magnetic core layer formed above the second insulating layer, a third insulating layer formed above the first magnetic core layer, and a second magnetic core layer formed above the third insulating layer. The micromagnetic device still further includes a fourth insulating layer formed above the second magnetic core layer, a second seed layer formed above the fourth insulating layer, and a second conductive winding layer formed above the second seed layer and in vias to the first conductive winding layer. The first and second conductive winding layers form a winding for the micromagnetic device.
公开/授权文献
- US20140104029A1 Micromagnetic Device and Method of Forming the Same 公开/授权日:2014-04-17
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