Invention Grant
- Patent Title: Semiconductor device
- Patent Title (中): 半导体器件
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Application No.: US14715641Application Date: 2015-05-19
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Publication No.: US09299772B2Publication Date: 2016-03-29
- Inventor: Yoshiyuki Sato , Yasutaka Nakashiba
- Applicant: Renesas Electronics Corporation
- Applicant Address: JP Tokyo
- Assignee: RENESAS ELECTRONICS CORPORATION
- Current Assignee: RENESAS ELECTRONICS CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Mattingly & Malur, P.C.
- Priority: JP2014-116435 20140605
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L29/06 ; H01L29/78 ; H01L29/10 ; H01L23/528

Abstract:
A semiconductor device in which the concentration of an electric field is suppressed in a region overriding a drain region and a source region. A drain region is formed in a first region, a source region is formed in a second region. A field oxide film surrounds the first region in a plan view. A metal interconnect situated over a field oxide film. The metal interconnect formed of a metal having an electric resistivity at 25° C. of 40 μΩ·cm or more and 200 μΩ·cm or less. Further, the metal interconnect is repeatedly provided spirally in a direction along the edges of the first region. Further, the metal interconnect is electrically connected at the innermost circumference with the drain region, and is connected at the outermost circumference to the source region or a ground potential.
Public/Granted literature
- US20150357404A1 SEMICONDUCTOR DEVICE Public/Granted day:2015-12-10
Information query
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