Invention Grant
US09299809B2 Methods of forming fins for a FinFET device wherein the fins have a high germanium content
有权
形成FinFET器件的翅片的方法,其中翅片具有高的锗含量
- Patent Title: Methods of forming fins for a FinFET device wherein the fins have a high germanium content
- Patent Title (中): 形成FinFET器件的翅片的方法,其中翅片具有高的锗含量
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Application No.: US13716758Application Date: 2012-12-17
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Publication No.: US09299809B2Publication Date: 2016-03-29
- Inventor: David P. Brunco
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/165

Abstract:
One illustrative method disclosed herein includes forming a silicon/germanium fin in a layer of insulating material, wherein the fin has a first germanium concentration, recessing an upper surface of the layer of insulating material so as to expose a portion of the fin, performing an oxidation process so as to oxidize at least a portion of the fin and form a region in the exposed portion of the fin that has a second germanium concentration that is greater than the first germanium concentration, removing the oxide materials from the fin that was formed during the oxidation process and forming a gate structure that is positioned around at least the region having the second germanium concentration.
Public/Granted literature
- US20140170839A1 METHODS OF FORMING FINS FOR A FINFET DEVICE WHEREIN THE FINS HAVE A HIGH GERMANIUM CONTENT Public/Granted day:2014-06-19
Information query
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