Invention Grant
US09299957B2 Method of manufacturing organic light emitting display apparatus by performing plasma surface process using target sputtering apparatus
有权
通过使用靶溅射装置进行等离子体表面处理来制造有机发光显示装置的方法
- Patent Title: Method of manufacturing organic light emitting display apparatus by performing plasma surface process using target sputtering apparatus
- Patent Title (中): 通过使用靶溅射装置进行等离子体表面处理来制造有机发光显示装置的方法
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Application No.: US14096587Application Date: 2013-12-04
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Publication No.: US09299957B2Publication Date: 2016-03-29
- Inventor: Su-Hyuk Choi
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Samsung-ro, Giheung-Gu, Yongin-si, Gyeonggi-Do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Samsung-ro, Giheung-Gu, Yongin-si, Gyeonggi-Do
- Agent Robert E. Bushnell, Esq.
- Priority: KR10-2013-0088180 20130725
- Main IPC: H01L51/56
- IPC: H01L51/56 ; H01L51/52 ; H01J37/34
Abstract:
A method of manufacturing an organic light-emitting display apparatus includes preparing a deposition target in which an organic light-emitting portion is formed on a substrate, forming a pre-encapsulation layer for encapsulating the organic light-emitting portion by using a facing target sputtering apparatus, and forming an encapsulation layer by performing a plasma surface process on the pre-encapsulation layer by using the facing target sputtering apparatus. The facing target sputtering apparatus includes a chamber in which a mounting portion for accommodating the deposition target is provided, a gas supply portion facing the mounting portion and supplying gas to the chamber, a first target portion and a second target portion disposed in the chamber and facing each other, and an induced magnetic field coil surrounding the exterior of the chamber.
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Information query
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