A method for manufacturing a touch sensor panel with a reduced number of masks includes forming a first resist layer with both full and partial thickness patterns, the latter being at a region corresponding to a plurality of first sensor electrodes; etching a first transparent conductive layer and a first other conductive layer using the first resist layer patterns having both full and partial thicknesses; forming a second resist layer with both full and partial thickness patterns, the latter being at a region corresponding to a plurality of second sensor electrodes; and etching while using the second resist layer patterns.