Invention Grant
- Patent Title: Non-newtonian lap
- Patent Title (中): 非牛顿圈
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Application No.: US13210800Application Date: 2011-08-16
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Publication No.: US09302367B2Publication Date: 2016-04-05
- Inventor: James H. Burge , Dae Wook Kim
- Applicant: James H. Burge , Dae Wook Kim
- Applicant Address: US AZ Tucson
- Assignee: Arizona Board of Regents on Behalf of the University of Arizona
- Current Assignee: Arizona Board of Regents on Behalf of the University of Arizona
- Current Assignee Address: US AZ Tucson
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Main IPC: B24B37/11
- IPC: B24B37/11 ; B24B37/24

Abstract:
In a non-conventional lap tool, i.e., not a stiff tool nor a conformable tool, and related method for grinding/polishing a substrate surface, includes a rigid base plate and attached work surface to define a cavity containing a non-Newtonian fluid. The non-Newtonian fluid behaves as a solid when the work surface is subjected to high shear stress, i.e., rapid tool stroke, yet behaves like a liquid when the tool is moved around the substrate surface when the shear stress of the work surface is low. A diaphragm can be used to further define the cavity and to seal within the non-Newtonian fluid therein.
Public/Granted literature
- US20120040590A1 NON-NEWTONIAN LAP Public/Granted day:2012-02-16
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