发明授权
- 专利标题: Non-newtonian lap
- 专利标题(中): 非牛顿圈
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申请号: US13210800申请日: 2011-08-16
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公开(公告)号: US09302367B2公开(公告)日: 2016-04-05
- 发明人: James H. Burge , Dae Wook Kim
- 申请人: James H. Burge , Dae Wook Kim
- 申请人地址: US AZ Tucson
- 专利权人: Arizona Board of Regents on Behalf of the University of Arizona
- 当前专利权人: Arizona Board of Regents on Behalf of the University of Arizona
- 当前专利权人地址: US AZ Tucson
- 代理机构: McDonnell Boehnen Hulbert & Berghoff LLP
- 主分类号: B24B37/11
- IPC分类号: B24B37/11 ; B24B37/24
摘要:
In a non-conventional lap tool, i.e., not a stiff tool nor a conformable tool, and related method for grinding/polishing a substrate surface, includes a rigid base plate and attached work surface to define a cavity containing a non-Newtonian fluid. The non-Newtonian fluid behaves as a solid when the work surface is subjected to high shear stress, i.e., rapid tool stroke, yet behaves like a liquid when the tool is moved around the substrate surface when the shear stress of the work surface is low. A diaphragm can be used to further define the cavity and to seal within the non-Newtonian fluid therein.
公开/授权文献
- US20120040590A1 NON-NEWTONIAN LAP 公开/授权日:2012-02-16
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