Invention Grant
- Patent Title: Mixed abrasive tungsten CMP composition
- Patent Title (中): 混合研磨钨CMP组成
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Application No.: US14222736Application Date: 2014-03-24
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Publication No.: US09303190B2Publication Date: 2016-04-05
- Inventor: William Ward , Glenn Whitener , Steven Grumbine , Jeffrey Dysard
- Applicant: Cabot Microelectronics Corporation
- Applicant Address: US IL Aurora
- Assignee: Cabot Microelectronics Corporation
- Current Assignee: Cabot Microelectronics Corporation
- Current Assignee Address: US IL Aurora
- Agent Thomas Omholt; Arlene Hornilla; Christopher C. Streinz
- Main IPC: C09G1/00
- IPC: C09G1/00 ; C09G1/02 ; H01L21/321 ; C09G1/04 ; H01L21/306

Abstract:
A chemical mechanical polishing composition for polishing a substrate having a tungsten layer includes a water based liquid carrier, first and second colloidal silica abrasives dispersed in the liquid carrier, and an iron containing accelerator. The first colloidal silica abrasive and the second colloidal silica abrasive each have a permanent positive charge of at least 10 mV. An average particle size of the second silica abrasive is at least 20 nanometers greater than an average particle size of the first silica abrasive. A method for chemical mechanical polishing a substrate including a tungsten layer is further disclosed. The method may include contacting the substrate with the above described polishing composition, moving the polishing composition relative to the substrate, and abrading the substrate to remove a portion of the tungsten from the substrate and thereby polish the substrate.
Public/Granted literature
- US20150267083A1 MIXED ABRASIVE TUNGSTEN CMP COMPOSITION Public/Granted day:2015-09-24
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