发明授权
- 专利标题: Angular velocity sensor
- 专利标题(中): 角速度传感器
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申请号: US13989644申请日: 2011-12-22
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公开(公告)号: US09303993B2公开(公告)日: 2016-04-05
- 发明人: Tsuyoshi Fujii , Kensaku Yamamoto
- 申请人: Tsuyoshi Fujii , Kensaku Yamamoto
- 申请人地址: JP Osaka
- 专利权人: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- 当前专利权人: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- 当前专利权人地址: JP Osaka
- 代理机构: Pearne & Gordon LLP
- 优先权: JP2010-291931 20101228
- 国际申请: PCT/JP2011/007190 WO 20111222
- 国际公布: WO2012/090452 WO 20120705
- 主分类号: G01C19/56
- IPC分类号: G01C19/56 ; G01C19/574 ; G01C19/5607 ; G01C19/5719 ; H01L41/113
摘要:
An angular velocity sensor includes a sensor element having a shape defined in an XYZ space, and can detect an angular velocity about a Z axis. The sensor element includes a support body extending in a direction of an X axis, an arm connected with the support body, and a weight connected with the arm. The arm has a first end connected with the support body and a second end connected with the weight. The arm has substantially a J-shape including a first arm portion extending in a direction of a Y axis from the first end to a first corner, a second arm portion extending in the direction of the X axis from the first corner to a second corner, and a third arm portion extending in the direction of the Y axis from the second corner to the second end. The length of the arm in the direction of the X axis is larger than the length of the weight in the direction of the X axis. This angular velocity sensor can improve the sensibility to angular velocity about the Z axis.
公开/授权文献
- US20130239681A1 ANGULAR VELOCITY SENSOR 公开/授权日:2013-09-19