Invention Grant
- Patent Title: Methods for fabricating integrated circuits using directed self-assembly including lithographically-printable assist features
- Patent Title (中): 使用定向自组装制造集成电路的方法,包括光刻可印刷的辅助特征
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Application No.: US14185491Application Date: 2014-02-20
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Publication No.: US09305800B2Publication Date: 2016-04-05
- Inventor: Tamer Coskun , Wei-Long Wang , Azat Latypov , Yi Zou
- Applicant: GLOBALFOUNDRIES, Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES, INC.
- Current Assignee: GLOBALFOUNDRIES, INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Ingrassia Fisher & Lorenz, P.C.
- Main IPC: H01L21/308
- IPC: H01L21/308 ; H01L21/027

Abstract:
Methods for fabricating integrated circuits are provided. In one example, a method for fabricating an integrated circuit includes forming assisting etch resistant fill topographical features that overlie a semiconductor substrate and that define an assisting etch resistant fill confinement well using a photomask. The photomask defines an assisting lithographically-printable mask feature. A block copolymer is deposited into the assisting etch resistant fill confinement well. The block copolymer is phase separated into an etchable phase and an etch resistant phase. The assisting etch resistant fill topographical features direct the etch resistant phase to form an etch resistant plug in the assisting etch resistant fill confinement well.
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