发明授权
- 专利标题: Stain compensation in transistors
- 专利标题(中): 晶体管中的污染补偿
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申请号: US14825130申请日: 2015-08-12
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公开(公告)号: US09306068B2公开(公告)日: 2016-04-05
- 发明人: Van H. Le , Benjamin Chu-Kung , Harold Hal W. Kennel , Willy Rachmady , Ravi Pillarisetty , Jack T. Kavalieros
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Blakely, Sokoloff, Taylor & Zafman LLP
- 主分类号: H01L21/02
- IPC分类号: H01L21/02 ; H01L29/66 ; H01L29/78 ; H01L29/165 ; H01L21/283 ; H01L29/10
摘要:
Transistor structures having channel regions comprising alternating layers of compressively and tensilely strained epitaxial materials are provided. The alternating epitaxial layers can form channel regions in single and multigate transistor structures. In alternate embodiments, one of the two alternating layers is selectively etched away to form nanoribbons or nanowires of the remaining material. The resulting strained nanoribbons or nanowires form the channel regions of transistor structures. Also provided are computing devices comprising transistors comprising channel regions comprised of alternating compressively and tensilely strained epitaxial layers and computing devices comprising transistors comprising channel regions comprised of strained nanoribbons or nanowires.
公开/授权文献
- US20150380557A1 STAIN COMPENSATION IN TRANSISTORS 公开/授权日:2015-12-31
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