Invention Grant
- Patent Title: MEMS microphone packaging method
- Patent Title (中): MEMS麦克风包装方法
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Application No.: US14531222Application Date: 2014-11-03
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Publication No.: US09309108B2Publication Date: 2016-04-12
- Inventor: Hsien-Ken Liao , Ming-Te Tu
- Applicant: LINGSEN PRECISION INDUSTRIES, LTD.
- Applicant Address: TW Taichung
- Assignee: LINGSEN PRECISION INDUSTRIES, LTD.
- Current Assignee: LINGSEN PRECISION INDUSTRIES, LTD.
- Current Assignee Address: TW Taichung
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: TW103128417A 20140819
- Main IPC: H01L21/00
- IPC: H01L21/00 ; B81C1/00 ; H04R1/08

Abstract:
A MEMS microphone packaging method includes the steps of: providing a substrate having a conducting part and a through hole; mounting a processor chip on the substrate and electrically connecting the processor chip to the conducting part; mounting a sensor chip on the substrate over the through hole and adjacent to the processor chip and electrically connecting the sensor chip to the processor chip; and mounting a cover on the substrate over the processor chip and the sensor chip. The cover has a conducting circuit, and the conducting circuit electrically coupled with the conducting part. Thus, the method of the invention can make a flip architecture MEMS microphone, reducing the steps of the packaging process and lowering the degree of difficulty of the manufacturing process and the manufacturing costs.
Public/Granted literature
- US20160052779A1 MEMS MICROPHONE PACKAGING METHOD Public/Granted day:2016-02-25
Information query
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