发明授权
- 专利标题: Component cleaning in a metal plating apparatus
- 专利标题(中): 金属电镀设备中的部件清洗
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申请号: US13232152申请日: 2011-09-14
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公开(公告)号: US09309603B2公开(公告)日: 2016-04-12
- 发明人: Daniel J. Woodruff
- 申请人: Daniel J. Woodruff
- 申请人地址: US CA Santa Clara
- 专利权人: APPLIED Materials, Inc
- 当前专利权人: APPLIED Materials, Inc
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Perkins Coie LLP
- 代理商 Kenneth H. Ohriner
- 主分类号: B08B7/00
- IPC分类号: B08B7/00 ; B08B7/04 ; C25D17/00 ; C25D21/08
摘要:
A plating apparatus includes a vessel for holding a bath of plating liquid. A head is adapted to hold a work piece, such as a silicon wafer, in the vessel, with a seal on the head sealing against the work piece. A component cleaner assembly may be used to automatically clean a component of the plating apparatus, such as a seal or a contact ring. The cleaner assembly has a component contactor, such as a brush, on an arm. An arm actuator is linked to the arm for moving the arm from a retracted position, to a deployed position, where the contactor is in physical contact with the component. A method for cleaning a component of a plating apparatus includes moving a scrubber or contactor into contact with the component and applying a cleaning liquid onto the component adjacent to the contactor.
公开/授权文献
- US20130061875A1 COMPONENT CLEANING IN A METAL PLATING APPARATUS 公开/授权日:2013-03-14
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