发明授权
- 专利标题: Wafer carrier
- 专利标题(中): 晶圆载体
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申请号: US14238693申请日: 2012-08-13
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公开(公告)号: US09312157B2公开(公告)日: 2016-04-12
- 发明人: Michael S. Adams , Barry Gregerson , Matthew A. Fuller
- 申请人: Michael S. Adams , Barry Gregerson , Matthew A. Fuller
- 申请人地址: US MA Billerica
- 专利权人: ENTEGRIS, INC.
- 当前专利权人: ENTEGRIS, INC.
- 当前专利权人地址: US MA Billerica
- 国际申请: PCT/US2012/050624 WO 20120813
- 国际公布: WO2013/025629 WO 20130221
- 主分类号: H01L21/673
- IPC分类号: H01L21/673
摘要:
A front opening wafer container suitable for large wafers such as 450 mm utilizes componentry with separate fasteners to lock the componentry together in an expedient manner providing robust connections and cost efficiencies. A container portion has an open front and receives on a bottom surface a base plate secured by twist lock connectors that also provide recesses for purge grommets. Kinematic coupling components readily and robustly lock onto the base plate. Interior wafer support components latch onto brackets on the side walls utilizing a separate locking insert with holding tabs and locking detents. A wafer retainer provides support and counters enhanced wafer sag associated with 450 mm wafers when the door is installed and seated.
公开/授权文献
- US20150041353A1 WAFER CARRIER 公开/授权日:2015-02-12
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