发明授权
US09312182B2 Forming gate and source/drain contact openings by performing a common etch patterning process
有权
通过执行公共蚀刻图案化工艺来形成栅极和源极/漏极接触开口
- 专利标题: Forming gate and source/drain contact openings by performing a common etch patterning process
- 专利标题(中): 通过执行公共蚀刻图案化工艺来形成栅极和源极/漏极接触开口
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申请号: US14301748申请日: 2014-06-11
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公开(公告)号: US09312182B2公开(公告)日: 2016-04-12
- 发明人: Ruilong Xie , William J. Taylor, Jr. , Min Gyu Sung
- 申请人: GLOBALFOUNDRIES Inc.
- 申请人地址: KY Grand Cayman
- 专利权人: GLOBALFOUNDRIES Inc.
- 当前专利权人: GLOBALFOUNDRIES Inc.
- 当前专利权人地址: KY Grand Cayman
- 代理机构: Amerson Law Firm, PLLC
- 主分类号: H01L21/8238
- IPC分类号: H01L21/8238 ; H01L21/8234 ; H01L21/28 ; H01L27/088 ; H01L29/06
摘要:
One method disclosed herein includes forming an opening in a layer of material so as to expose the source/drain regions of a transistor and a first portion of a gate cap layer positioned above an active region, reducing the thickness of a portion of the gate cap layer positioned above the isolation region, defining separate initial source/drain contacts positioned on opposite sides of the gate structure, performing a common etching process sequence to define a gate contact opening that extends through the reduced-thickness portion of the gate cap layer and a plurality of separate source/drain contact openings in the layer of insulating material, and forming a conductive gate contact structure and conductive source/drain contact structures.
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