Invention Grant
US09314901B2 CMP pad conditioner, and method for producing the CMP pad conditioner 有权
CMP垫调节剂及其制造方法

CMP pad conditioner, and method for producing the CMP pad conditioner
Abstract:
This invention relates to a conditioner for a CMP (Chemical Mechanical Polishing) pad, which is used in a CMP process which is part of the fabrication of a semiconductor device, and more particularly, to a CMP pad conditioner in which the structure of the cutting tips is such that the change in the wear of the polishing pad is not great even when different kinds of slurry are used and when there are changes in pressure of the conditioner, and to a method of manufacturing the same.
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