Invention Grant
- Patent Title: Ion beam extraction by discrete ion focusing
- Patent Title (中): 通过离散离子聚焦提取离子束
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Application No.: US13123692Application Date: 2009-10-08
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Publication No.: US09318297B2Publication Date: 2016-04-19
- Inventor: Eugen Stamate
- Applicant: Eugen Stamate
- Applicant Address: DK Kgs. Lyngby
- Assignee: DANMARKS TEKNISKE UNIVERSITET
- Current Assignee: DANMARKS TEKNISKE UNIVERSITET
- Current Assignee Address: DK Kgs. Lyngby
- Agency: Lee & Morse, P.C.
- Priority: EP08017709 20081009
- International Application: PCT/EP2009/063101 WO 20091008
- International Announcement: WO2010/040805 WO 20100415
- Main IPC: H01J27/02
- IPC: H01J27/02 ; H01J37/08

Abstract:
An apparatus and methods are disclosed for ion beam extraction. In an implementation, the apparatus includes a plasma source (or plasma) and an ion extractor. The plasma source is adapted to generate ions and the ion extractor is immersed in the plasma source to extract a fraction of the generated ions. The ion extractor is surrounded by a space charge formed at least in part by the extracted ions. The ion extractor includes a biased electrode forming an interface with an insulator. The interface is customized to form a strongly curved potential distribution in the space-charge surrounding the ion extractor. The strongly curved potential distribution focuses the extracted ions towards an opening on a surface of the biased electrode thereby resulting in anion beam.
Public/Granted literature
- US20110266957A1 ION BEAM EXTRACTION BY DISCRETE ION FOCUSING Public/Granted day:2011-11-03
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