发明授权
- 专利标题： Plasma chamber top piece assembly
- 专利标题（中）： 等离子室顶部组件
-
申请号： US13950040申请日： 2013-07-24
-
公开(公告)号： US09318349B2公开(公告)日： 2016-04-19
- 发明人: Leonard J. Sharpless , Keith Comendant
- 申请人： Leonard J. Sharpless , Keith Comendant
- 申请人地址： US CA Fremont
- 专利权人： Lam Research Corporation
- 当前专利权人： Lam Research Corporation
- 当前专利权人地址： US CA Fremont
- 代理机构： Beyer Law Group LLP
- 主分类号： C23C16/00
- IPC分类号： C23C16/00 ; C23F1/00 ; H01L21/306 ; H01L21/465 ; H01J37/21 ; H01J37/32 ; H01L21/67 ; C03C15/00 ; C03C17/00 ; H01L21/4763
摘要：
A plasma processing system for processing a substrate is described. The plasma processing system includes a bottom piece including a chuck configured for holding the substrate. The plasma processing system also includes an induction coil configured to generate an electromagnetic field in order to create a plasma for processing the substrate; and an optimized top piece coupled to the bottom piece, the top piece further configured for a heating and cooling system. Wherein, the heating and cooling system is substantially shielded from the electromagnetic field by the optimized top piece, and the optimized top piece can substantially be handled by a single person.
公开/授权文献
- US20130306239A1 PLASMA CHAMBER TOP PIECE ASSEMBLY 公开/授权日：2013-11-21