Invention Grant
- Patent Title: Slot designs in wide metal lines
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Application No.: US10923123Application Date: 2004-08-21
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Publication No.: US09318378B2Publication Date: 2016-04-19
- Inventor: Yeow Kheng Lim , Alex See , Tae Jong Lee , David Vigar , Liang Choo Hsia , Kin Leong Pey
- Applicant: Yeow Kheng Lim , Alex See , Tae Jong Lee , David Vigar , Liang Choo Hsia , Kin Leong Pey
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Horizon IP Pte. Ltd.
- Main IPC: H01L21/76
- IPC: H01L21/76 ; H01L21/768 ; H01L23/522 ; H01L23/528 ; H01L23/532

Abstract:
A method and structure for slots in wide lines to reduce stress. An example embodiment method and structure for is an interconnect structure comprising: interconnect comprising a wide line. The wide line has a first slot. The first slot is spaced a first distance from a via plug so that the first slot relieves stress on the wide line and the via plug. The via plug can contact the wide line from above or below. Another example embodiment is a dual damascene interconnect structure comprising: an dual damascene shaped interconnect comprising a via plug, a first slot and a wide line. The wide line has the first slot. The first slot is spaced a first distance from the via plug so that the first slot relieves stress on the wide line and the via plug.
Public/Granted literature
- US20060040491A1 Slot designs in wide metal lines Public/Granted day:2006-02-23
Information query
IPC分类: