Invention Grant
- Patent Title: Silicon carbide single-crystal substrate
- Patent Title (中): 碳化硅单晶基板
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Application No.: US14619510Application Date: 2015-02-11
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Publication No.: US09318563B2Publication Date: 2016-04-19
- Inventor: Kyoko Okita , Keiji Ishibashi
- Applicant: Sumitomo Electric Industries, Ltd.
- Applicant Address: JP Osaka-shi, Osaka
- Assignee: SUMITOMO ELECTRIC INDUSTRIES, LTD.
- Current Assignee: SUMITOMO ELECTRIC INDUSTRIES, LTD.
- Current Assignee Address: JP Osaka-shi, Osaka
- Agency: Drinker Biddle & Reath LLP
- Priority: JP2012-088916 20120410
- Main IPC: H01L29/16
- IPC: H01L29/16 ; H01L29/34 ; B24B9/06 ; B24D3/06 ; H01L23/00 ; H01L29/04

Abstract:
A silicon carbide single-crystal substrate includes a first surface, a second surface opposite to the first surface, and a peripheral edge portion sandwiched between the first surface and the second surface. A plurality of grinding traces are formed in a surface of the peripheral edge portion. A chamfer width as a distance from an outermost peripheral end portion of the peripheral edge portion to one of the plurality of grinding traces which is located on an innermost peripheral side of the peripheral edge portion in a direction parallel to the first surface is not less than 50 μm and not more than 400 μm. Thereby, a silicon carbide single-crystal substrate capable of suppressing occurrence of a crack, and a method for manufacturing the same can be provided.
Public/Granted literature
- US20150221729A1 SILICON CARBIDE SINGLE-CRYSTAL SUBSTRATE Public/Granted day:2015-08-06
Information query
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