Invention Grant
US09318644B2 Ion implantation and annealing for thin film crystalline solar cells 有权
薄膜晶体太阳能电池的离子注入和退火

Ion implantation and annealing for thin film crystalline solar cells
Abstract:
A back contact back junction thin-film solar cell is formed on a thin-film semiconductor solar cell. Preferably the thin film semiconductor material comprises crystalline silicon. Base regions, emitter regions, and front surface field regions are formed through ion implantation and annealing processes.
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