Invention Grant
- Patent Title: Laser beam output control with optical shutter
- Patent Title (中): 激光束输出控制与光学快门
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Application No.: US13642408Application Date: 2011-12-15
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Publication No.: US09318864B2Publication Date: 2016-04-19
- Inventor: Krzysztof Nowak , Osamu Wakabayashi , Hideo Hoshino
- Applicant: Krzysztof Nowak , Osamu Wakabayashi , Hideo Hoshino
- Applicant Address: JP Tochigi
- Assignee: GIGAPHOTON INC.
- Current Assignee: GIGAPHOTON INC.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Priority: JP2010-283715 20101220; JP2011-066786 20110324; JP2011-190364 20110901; JP2011-250333 20111116
- International Application: PCT/IB2011/003068 WO 20111215
- International Announcement: WO2012/085638 WO 20120628
- Main IPC: H01S3/10
- IPC: H01S3/10 ; H01S3/00 ; H01S3/23 ; H05G2/00
Abstract:
A laser apparatus may include: a master oscillator configured to output a pulsed laser beam at a repetition rate; at least one amplifier disposed on a beam path of the pulsed laser beam; at least one optical shutter disposed on the beam path of the pulsed laser beam; and a controller configured to switch the at least one optical shutter.
Public/Granted literature
- US20130032735A1 LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM INCLUDING THE LASER APPARATUS Public/Granted day:2013-02-07
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