Invention Grant
- Patent Title: Electrostatic actuator with short circuit protection and process
- Patent Title (中): 静电执行器具有短路保护和过程
-
Application No.: US14193631Application Date: 2014-02-28
-
Publication No.: US09321265B2Publication Date: 2016-04-26
- Inventor: Peter J. Nystrom , Mark A. Cellura , Gary D. Redding , Peter M. Gulvin
- Applicant: XEROX CORPORATION
- Applicant Address: US CT Norwalk
- Assignee: XEROX CORPORATION
- Current Assignee: XEROX CORPORATION
- Current Assignee Address: US CT Norwalk
- Agency: MH2 Technology Law Group LLP
- Main IPC: B41J2/41
- IPC: B41J2/41 ; G11B3/00 ; B41J2/14 ; B41J2/16

Abstract:
An electrostatic actuator for a printhead. The electrostatic actuator may include a substrate. A dielectric layer may be disposed on the substrate. An electrode layer may be disposed on the dielectric layer. A first standoff layer may be disposed at least partially on the electrode layer. A second standoff layer may be disposed at least partially on the electrode layer and at least partially on the first standoff layer. A portion of the second standoff layer disposed on the electrode layer may be removed to form one or more landing pads. A membrane may be disposed at least partially on the second standoff layer.
Public/Granted literature
- US20150246539A1 ELECTROSTATIC ACTUATOR WITH SHORT CIRCUIT PROTECTION AND PROCESS Public/Granted day:2015-09-03
Information query
IPC分类: