Invention Grant
US09321628B2 MEMS device incorporating a fluidic path, and manufacturing process thereof
有权
结合流体路径的MEMS装置及其制造方法
- Patent Title: MEMS device incorporating a fluidic path, and manufacturing process thereof
- Patent Title (中): 结合流体路径的MEMS装置及其制造方法
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Application No.: US14316583Application Date: 2014-06-26
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Publication No.: US09321628B2Publication Date: 2016-04-26
- Inventor: Dino Faralli , Benedetto Vigna , Laura Maria Castoldi
- Applicant: STMicroelectronics S.r.l. , STMicroelectronics International N.V.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed Intellectual Property Law Group PLLC
- Priority: ITTO2013A0539 20130628
- Main IPC: B81B7/00
- IPC: B81B7/00 ; B81C1/00

Abstract:
A MEMS device wherein a die of semiconductor material has a first face and a second face. A membrane is formed in or on the die and faces the first surface. A cap is fixed to the first face of the first die and is spaced apart from the membrane by a space. The die is fixed, on its second face, to an ASIC, which integrates a circuit for processing the signals generated by the die. The ASIC is in turn fixed on a support. A packaging region coats the die, the cap, and the ASIC and seals them from the outside environment. A fluidic path is formed through the support, the ASIC, and the first die, and connects the membrane and the first face of the die with the outside, without requiring holes in the cap.
Public/Granted literature
- US20150001645A1 MEMS DEVICE INCORPORATING A FLUIDIC PATH, AND MANUFACTURING PROCESS THEREOF Public/Granted day:2015-01-01
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