发明授权
- 专利标题: Substrate storage rack
- 专利标题(中): 基板存储架
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申请号: US14240332申请日: 2014-01-17
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公开(公告)号: US09324596B2公开(公告)日: 2016-04-26
- 发明人: Jiangbo Yao , Chunliang Lee
- 申请人: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- 申请人地址: CN Shenzhen
- 专利权人: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- 当前专利权人: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- 当前专利权人地址: CN Shenzhen
- 代理机构: Stein IP, LLC
- 优先权: CN201310408422 20130909
- 国际申请: PCT/CN2014/070753 WO 20140117
- 国际公布: WO2015/032174 WO 20150312
- 主分类号: A47G19/08
- IPC分类号: A47G19/08 ; H01L21/673 ; B25H3/04
摘要:
The present disclosure relates to a substrate storage rack, including a hollow rack body with a first, a second, a third, and a fourth lateral surfaces, wherein at least one substrate laying layer is arranged in the rack body along a vertical direction. The substrate laying layer includes: a first support connected with the rack body and arranged at the second lateral surface; first supporting bars transversely arranged on the first support and extending to the interior of the rack body; a second support connected with the rack body and arranged at the fourth lateral surface; and second supporting bars transversely arranged on the second support and extending to the interior of the rack body. Since the first and the second supporting bars are arranged on the second and the fourth lateral surfaces of the rack body respectively, storing substrates in the rack body can be ensured. Then, the first lateral surface can be used as a fetching and feeding port for an automatic manipulator arm and the fourth lateral surface can be used as a manual fetching and feeding port, so that bidirectional fetching and feeding of the substrates in the substrate storage rack can be realized, and thus the production efficiency can be effectively improved.
公开/授权文献
- US20150155191A1 SUBSTRATE STORAGE RACK 公开/授权日:2015-06-04
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