Invention Grant
- Patent Title: Self-formation of high-density arrays of nanostructures
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Application No.: US14726104Application Date: 2015-05-29
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Publication No.: US09324794B2Publication Date: 2016-04-26
- Inventor: Christos D. Dimitrakopoulos , Jeehwan Kim , Hongsik Park , Byungha Shin
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Louis J. Percello
- Main IPC: H01L29/06
- IPC: H01L29/06 ; C30B25/18 ; H01L29/16 ; H01L29/32 ; C30B29/36 ; C30B33/06 ; B82Y10/00 ; B82Y40/00 ; H01L29/12

Abstract:
A method for forming nanostructures includes bonding a flexible substrate to a crystalline semiconductor layer having a two-dimensional material formed on a side opposite the flexible substrate. The crystalline semiconductor layer is stressed in a first direction to initiate first cracks in the crystalline semiconductor layer. The first cracks are propagated through the crystalline semiconductor layer and through the two-dimensional material. The stress of the crystalline semiconductor layer is released to provide parallel structures including the two-dimensional material on the crystalline semiconductor layer.
Public/Granted literature
- US20150263087A1 SELF-FORMATION OF HIGH-DENSITY ARRAYS OF NANOSTRUCTURES Public/Granted day:2015-09-17
Information query
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