Invention Grant
US09324842B2 Buried local interconnect in finfet structure and method of fabricating same 有权
在finfet结构中埋置局部互连及其制造方法

Buried local interconnect in finfet structure and method of fabricating same
Abstract:
A method for fabricating a finfet with a buried local interconnect and the resulting device are disclosed. Embodiments include forming a silicon fin on a BOX layer, forming a gate electrode perpendicular to the silicon fin over a portion of the silicon fin, forming a spacer on each of opposite sides of the gate electrode, forming source/drain regions on the silicon fin at opposite sides of the gate electrode, recessing the BOX layer, undercutting the silicon fin and source/drain regions, at opposite sides of the gate electrode, and forming a local interconnect on a recessed portion of the BOX layer.
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