Invention Grant
US09324842B2 Buried local interconnect in finfet structure and method of fabricating same
有权
在finfet结构中埋置局部互连及其制造方法
- Patent Title: Buried local interconnect in finfet structure and method of fabricating same
- Patent Title (中): 在finfet结构中埋置局部互连及其制造方法
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Application No.: US14135716Application Date: 2013-12-20
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Publication No.: US09324842B2Publication Date: 2016-04-26
- Inventor: Hui Zang , Chun-chen Yeh , Tenko Yamashita , Veeraraghavan Basker
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman US NY Armonk
- Assignee: GLOBALFOUNDRIES INC.,INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: GLOBALFOUNDRIES INC.,INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: KY Grand Cayman US NY Armonk
- Agency: Ditthavong & Steiner, P.C.
- Main IPC: H01L31/072
- IPC: H01L31/072 ; H01L29/66 ; H01L29/78 ; H01L21/306 ; H01L29/417

Abstract:
A method for fabricating a finfet with a buried local interconnect and the resulting device are disclosed. Embodiments include forming a silicon fin on a BOX layer, forming a gate electrode perpendicular to the silicon fin over a portion of the silicon fin, forming a spacer on each of opposite sides of the gate electrode, forming source/drain regions on the silicon fin at opposite sides of the gate electrode, recessing the BOX layer, undercutting the silicon fin and source/drain regions, at opposite sides of the gate electrode, and forming a local interconnect on a recessed portion of the BOX layer.
Public/Granted literature
- US20150179766A1 BURIED LOCAL INTERCONNECT IN FINFET STRUCTURE Public/Granted day:2015-06-25
Information query
IPC分类: