发明授权
US09324974B2 Laser induced thermal imaging apparatus and laser induced thermal imaging method using the same
有权
激光诱导热成像设备和激光诱导热成像方法使用相同
- 专利标题: Laser induced thermal imaging apparatus and laser induced thermal imaging method using the same
- 专利标题(中): 激光诱导热成像设备和激光诱导热成像方法使用相同
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申请号: US14031810申请日: 2013-09-19
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公开(公告)号: US09324974B2公开(公告)日: 2016-04-26
- 发明人: Sam Ho Ihm
- 申请人: Samsung Display Co., Ltd.
- 申请人地址: KR
- 专利权人: SAMSUNG DISPLAY CO., LTD.
- 当前专利权人: SAMSUNG DISPLAY CO., LTD.
- 当前专利权人地址: KR
- 代理机构: Innovation Counsel LLP
- 优先权: KR10-2013-0052618 20130509
- 主分类号: H01L51/00
- IPC分类号: H01L51/00 ; H01L51/56 ; B29L31/34
摘要:
A laser induced thermal imaging apparatus includes a nozzle part disposed over a donor film in a vacuum chamber so as to be spaced apart from the donor film, and configured to spray an inactive gas onto an upper surface of the donor film. Also included is a shielding layer disposed on the upper surface of the donor film to make contact with the donor film and shaped so as to be positioned along a circumference or outer edge of the donor film.
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