发明授权
US09328010B2 Method for structuring a flat substrate composed of glass-type material, and optical component
有权
用于构造由玻璃型材料构成的平坦基板和光学部件的方法
- 专利标题: Method for structuring a flat substrate composed of glass-type material, and optical component
- 专利标题(中): 用于构造由玻璃型材料构成的平坦基板和光学部件的方法
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申请号: US14238564申请日: 2012-08-02
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公开(公告)号: US09328010B2公开(公告)日: 2016-05-03
- 发明人: Norman Marenco , Hans-Joachim Quenzer
- 申请人: Norman Marenco , Hans-Joachim Quenzer
- 申请人地址: DE Munich
- 专利权人: FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
- 当前专利权人: FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
- 当前专利权人地址: DE Munich
- 代理机构: Fitch, Even, Tabin & Flannery LLP
- 优先权: DE102011110166 20110812
- 国际申请: PCT/EP2012/003332 WO 20120802
- 国际公布: WO2013/023750 WO 20130221
- 主分类号: G02B6/26
- IPC分类号: G02B6/26 ; G02B6/42 ; C03B23/02 ; G02B6/43 ; C03B40/02
摘要:
The invention is a method for structuring a flat substrate composed of glass material in the course of a viscous flow process. The glass flat substrate is joined to a surface of a flat substrate, which is preferably a semiconductor flat substrate, having at least one depression bounded by a circumferential edge located in the surface. In the course of a subsequent tempering process, glass material is changed to a viscous free-flowing state in which at least proportions of the free-flowing glass material of the flat substrate flow over the circumferential edge into the depression in the flat substrate. The invention is also characterized in that a flat substrate is provided of which the at least one depression has at least one wetting surface that is countersunk with respect to the surface of the flat substrate and is at least partly bounded by a line-type edge which, at the same time, is an edge of a trench structure provided within the depression and countersunk with respect to the wetting surface and/or is determined by a discontinuous change in a wetting property for the free-flowing glass material that can be assigned to the wetting surface.
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