Invention Grant
- Patent Title: Solder bump sealing method and device
- Patent Title (中): 焊接凸块密封方法及装置
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Application No.: US14456972Application Date: 2014-08-11
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Publication No.: US09330874B2Publication Date: 2016-05-03
- Inventor: Benedikt Zeyen , Vikram Patil
- Applicant: Innovative Micro Technology
- Applicant Address: US CA Goleta
- Assignee: Innovative Micro Technology
- Current Assignee: Innovative Micro Technology
- Current Assignee Address: US CA Goleta
- Agent Jaquelin K. Spong
- Main IPC: H01H59/00
- IPC: H01H59/00 ; H01H49/00

Abstract:
A method for forming a cavity in a microfabricated structure, includes the sealing of that cavity with a low temperature solder. The method may include forming a sacrificial layer over a substrate, forming a flexible membrane over the sacrificial layer, forming a release hole through a flexible membrane to the sacrificial layer, introducing an etchant through the release hole to remove the sacrificial layer, and then sealing that release hole with a low temperature solder.
Public/Granted literature
- US20160042902A1 SOLDER BUMP SEALING METHOD AND DEVICE Public/Granted day:2016-02-11
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