Invention Grant
US09331449B2 Gas laser oscillator capable of controlling gas pressure and gas consumption amount
有权
气体激光振荡器能够控制气体压力和气体消耗量
- Patent Title: Gas laser oscillator capable of controlling gas pressure and gas consumption amount
- Patent Title (中): 气体激光振荡器能够控制气体压力和气体消耗量
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Application No.: US14797735Application Date: 2015-07-13
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Publication No.: US09331449B2Publication Date: 2016-05-03
- Inventor: Munekazu Matsuda , Hiroyuki Yoshida
- Applicant: FANUC CORPORATION
- Applicant Address: JP Yamanashi
- Assignee: FANUC CORPORATION
- Current Assignee: FANUC CORPORATION
- Current Assignee Address: JP Yamanashi
- Agency: RatnerPrestia
- Priority: JP2014-144501 20140714
- Main IPC: H01S3/22
- IPC: H01S3/22 ; H01S3/036 ; H01S3/223 ; H01S3/225

Abstract:
A gas laser oscillator includes a first control valve for controlling an amount of laser gas supplied into a gas container, a second control valve for controlling an amount of laser gas exhausted from the gas container, and a controller for controlling openings of the first and second control valves. The controller includes a storage unit for storing data indicating a relationship between the laser gas pressure in the gas container, the opening of the second control valve, and the exhaust amount of laser gas, a gas pressure control unit for controlling the openings of the first and second control valves, respectively, such that the laser gas pressure becomes closer to a reference gas pressure, and a gas consumption amount control unit for controlling the openings of the first and second control valves, respectively, such that the exhaust amount of laser gas becomes closer to a target consumption amount.
Public/Granted literature
- US20160013606A1 GAS LASER OSCILLATOR CAPABLE OF CONTROLLING GAS PRESSURE AND GAS CONSUMPTION AMOUNT Public/Granted day:2016-01-14
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