Invention Grant
- Patent Title: Micromechanical detection structure for a MEMS acoustic transducer and corresponding manufacturing process
- Patent Title (中): MEMS声学传感器的微机械检测结构及相应的制造工艺
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Application No.: US14254511Application Date: 2014-04-16
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Publication No.: US09332354B2Publication Date: 2016-05-03
- Inventor: Sebastiano Conti , Marco Salina , Luca Lamagna , Matteo Perletti
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group PLLC
- Priority: ITTO2013A0313 20130418
- Main IPC: H04R25/00
- IPC: H04R25/00 ; H04R23/00 ; H04R19/00 ; H04R19/04 ; H04R31/00

Abstract:
A micromechanical structure for a MEMS capacitive acoustic transducer, has: a substrate made of semiconductor material, having a front surface lying in a horizontal plane; a membrane, coupled to the substrate and designed to undergo deformation in the presence of incident acoustic-pressure waves; a fixed electrode, which is rigid with respect to the acoustic-pressure waves and is coupled to the substrate by means of an anchorage structure, in a suspended position facing the membrane to form a detection capacitor. The anchorage structure has at least one pillar element, which is at least in part distinct from the fixed electrode and supports the fixed electrode in a position parallel to the horizontal plane.
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