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US09334421B2 Method and device for coating with polyimide solution 有权
用聚酰亚胺溶液涂覆的方法和装置

Method and device for coating with polyimide solution
摘要:
A method and device for coating with polyimide solution are provided. The method includes the following steps: placing a glass substrate onto a support surface to form a face contact therebetween; heating the glass substrate to a preset coating temperature through the support surface; and coating the glass substrate with the polyimide solution. With the glass substrate heated before being coated, the polyimide solution diffusion and solvent evaporation during coating can be accelerated, which is conducive to controlling the temperature uniformity and consistency and preventing the cloud-like spots. The glass substrate in face contact with the support plate is more conducive to being fully heated, and can prevent the glass substrate from being heated non-uniformly due to the contact of the glass substrate with the supporting legs, thereby preventing the foot-like spots.
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