发明授权
- 专利标题： Region-of-interest determination apparatus, observation tool or inspection tool, region-of-interest determination method, and observation method or inspection method using region-of-interest determination method
- 专利标题（中）： 感兴趣区域确定装置，观察工具或检查工具，感兴趣区域确定方法和使用区域确定方法的观察方法或检查方法
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申请号： US14239653申请日： 2012-07-09
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公开(公告)号： US09335277B2公开(公告)日： 2016-05-10
- 发明人: Ryo Nakagaki , Takehiro Hirai , Kenji Obara
- 申请人： Ryo Nakagaki , Takehiro Hirai , Kenji Obara
- 申请人地址： JP Tokyo
- 专利权人： Hitachi High-Technologies Corporation
- 当前专利权人： Hitachi High-Technologies Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： McDermott Will & Emery LLP
- 优先权： JP2011-194506 20110907
- 国际申请： PCT/JP2012/067419 WO 20120709
- 国际公布： WO2013/035421 WO 20130314
- 主分类号： G06K9/00
- IPC分类号： G06K9/00 ; G01N21/95 ; G01N23/225 ; H01L21/66
摘要：
A region-of-interest determination apparatus includes: a calculation unit and a region determination unit. The calculation unit calculates a degree of a defect based on at least a plurality of kinds of defect attribute information regarding defect data. The defect data includes an image corresponding to a defect position detected on a specimen by inspection thereof or an image corresponding to a defect position predicted to be likely to develop a defect on the specimen, where both images are obtained by imaging. The region determination unit extracts the defect data of which the degree is higher than a predetermined level, and determines the region to be observed or inspected on the specimen based on the extracted defect data.