Invention Grant
US09335768B2 Cluster mass flow devices and multi-line mass flow devices incorporating the same
有权
集群质量流量装置和结合其的多线质量流量装置
- Patent Title: Cluster mass flow devices and multi-line mass flow devices incorporating the same
- Patent Title (中): 集群质量流量装置和结合其的多线质量流量装置
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Application No.: US14025162Application Date: 2013-09-12
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Publication No.: US09335768B2Publication Date: 2016-05-10
- Inventor: Mark Taskar , Iqbal Shareef
- Applicant: Lam Research Corporation
- Applicant Address: US CA Freemont
- Assignee: LAM RESEARCH CORPORATION
- Current Assignee: LAM RESEARCH CORPORATION
- Current Assignee Address: US CA Freemont
- Main IPC: F16K27/00
- IPC: F16K27/00 ; G05D7/06
Abstract:
A multi-line mass flow device configured for controlled delivery of two or more fluids into a process chamber. The multi-line mass flow device comprises a cluster mass flow control manifold and a multi-inlet manifold. The cluster mass flow control manifold comprises a controller, a gas manifold mounting block, and two or more gas flow control stations. The multi-inlet manifold comprises a multi-inlet mounting block, and two or more isolation valves mounted on the multi-inlet mounting block.
Public/Granted literature
- US20150068613A1 Clutter Mass Flow Devices and Multi-Line Mass Flow Devices Incorporating The Same Public/Granted day:2015-03-12
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