Invention Grant
- Patent Title: MEMS lifetime enhancement
- Patent Title (中): MEMS寿命增强
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Application No.: US13916675Application Date: 2013-06-13
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Publication No.: US09336953B2Publication Date: 2016-05-10
- Inventor: Cong Quoc Khieu , Vikram Joshi , Richard L. Knipe
- Applicant: CAVENDISH KINETICS INC.
- Applicant Address: US CA San Jose
- Assignee: CAVENDISH KINETICS INC.
- Current Assignee: CAVENDISH KINETICS INC.
- Current Assignee Address: US CA San Jose
- Agency: Patterson & Sheridan, LLP
- Main IPC: H01G5/16
- IPC: H01G5/16 ; B81B7/02 ; H01G5/18 ; H01G5/38 ; H01H59/00

Abstract:
The present invention generally relates to methods for increasing the lifetime of MEMS devices by reducing the number of movements of a switching element in the MEMS device. Rather than returning to a ground state between cycles, the switching element can remain in the same state if both cycles necessitate the same capacitance. For example, if in both a first and second cycle, the switching element of the MEMS device is in a state of high capacitance the switching element can remain in place between the first and second cycle rather than move to the ground state. Even if the polarity of the capacitance is different in successive cycles, the switching element can remain in place and the polarity can be switched. Because the switching element remains in place between cycles, the switching element, while having the same finite number of movements, should have a longer lifetime.
Public/Granted literature
- US20130335878A1 MEMS LIFETIME ENHANCEMENT Public/Granted day:2013-12-19
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