Invention Grant
- Patent Title: Three-dimensional nonvolatile memory devices including interposed floating gates
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Application No.: US14619921Application Date: 2015-02-11
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Publication No.: US09337351B2Publication Date: 2016-05-10
- Inventor: Byoungkeun Son , Hansoo Kim , Jinho Kim , Kihyun Kim
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel & Sibley, P.A.
- Priority: KR10-2009-0023626 20090319
- Main IPC: H01L29/788
- IPC: H01L29/788 ; H01L29/66 ; H01L29/423 ; H01L29/78 ; H01L27/115

Abstract:
Provided are three-dimensional nonvolatile memory devices and methods of fabricating the same. The memory devices include semiconductor pillars penetrating interlayer insulating layers and conductive layers alternately stacked on a substrate and electrically connected to the substrate and floating gates selectively interposed between the semiconductor pillars and the conductive layers. The floating gates are formed in recesses in the conductive layers.
Public/Granted literature
- US20150155292A1 THREE-DIMENSIONAL NONVOLATILE MEMORY DEVICES INCLUDING INTERPOSED FLOATING GATES Public/Granted day:2015-06-04
Information query
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