Invention Grant
- Patent Title: Integrated acoustic transducer in MEMS technology, and manufacturing process thereof
-
Application No.: US14035798Application Date: 2013-09-24
-
Publication No.: US09340413B2Publication Date: 2016-05-17
- Inventor: Angelo Antonio Merassi , Sarah Zerbini , Luca Coronato
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed Intellectual Property Law Group, PLLC
- Priority: ITTO2008A0982 20081223
- Main IPC: H04R25/00
- IPC: H04R25/00 ; B81C1/00 ; B81B3/00 ; H04R7/24 ; H04R19/00 ; H04R31/00 ; H04R19/04
Abstract:
A MEMS acoustic transducer, for example, a microphone, includes a substrate provided with a cavity, a supporting structure, fixed to the substrate, a membrane having a perimetral edge and a centroid, suspended above the cavity and fixed to the substrate the membrane configured to oscillate via the supporting structure. The supporting structure includes a plurality of anchorage elements fixed to the membrane, and each anchorage element is coupled to a respective portion of the membrane between the centroid and the perimetral edge of the membrane.
Public/Granted literature
- US20140038335A1 INTEGRATED ACOUSTIC TRANSDUCER IN MEMS TECHNOLOGY, AND MANUFACTURING PROCESS THEREOF Public/Granted day:2014-02-06
Information query
