Invention Grant
- Patent Title: MEMS device
- Patent Title (中): MEMS器件
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Application No.: US14406498Application Date: 2012-06-13
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Publication No.: US09341840B2Publication Date: 2016-05-17
- Inventor: Nicolas Abele , Faouzi Khechana , Julien Gamet
- Applicant: Nicolas Abele , Faouzi Khechana , Julien Gamet
- Applicant Address: US CA Santa Clara
- Assignee: INTEL CORPORATION
- Current Assignee: INTEL CORPORATION
- Current Assignee Address: US CA Santa Clara
- Agency: Kacvinsky Daisak Bluni PLLC
- International Application: PCT/EP2012/061196 WO 20120613
- International Announcement: WO2013/185812 WO 20131219
- Main IPC: G02B26/08
- IPC: G02B26/08 ; B81B3/00 ; G02B26/10

Abstract:
According to the present invention there is provided a MEMS device comprising, a mirror which is connected to a fixed portion by means of a first and second torsional arm, each of the first and second torsional arms are configured such that they can twist about torsional axes so as to oscillate the mirror about a first oscillation axes, and wherein the first and second torsional arms are each configured to have two or more meanders and wherein the first and second torsional arms are arranged symmetrically relative to the first oscillation axis.
Public/Granted literature
- US20150168714A1 MEMS DEVICE Public/Granted day:2015-06-18
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