Invention Grant
- Patent Title: Method for fabricating a magnetic writer having half shields
- Patent Title (中): 一种具有半屏蔽的磁性写入器的制造方法
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Application No.: US14578449Application Date: 2014-12-21
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Publication No.: US09343087B1Publication Date: 2016-05-17
- Inventor: Ronghui Zhou , Xiaoyu Yang , Ming Jiang , Jinqiu Zhang
- Applicant: Western Digital (Fremont), LLC
- Applicant Address: US CA Fremont
- Assignee: Western Digital (Fremont), LLC
- Current Assignee: Western Digital (Fremont), LLC
- Current Assignee Address: US CA Fremont
- Main IPC: B44C1/22
- IPC: B44C1/22 ; G11B5/84 ; G11B5/23 ; G11B5/255 ; G11B5/187

Abstract:
A method manufacturing a magnetic writer provides an intermediate layer including multiple sublayers is provided. The sublayers include first and second nonmagnetic layers and an etch stop layer being between the first and second nonmagnetic layers. A trench is formed in the intermediate layer using at least one etch, such as a reactive ion etch. The trench has a location and profile corresponding to the main pole. A main pole having a bottom and a top is provided in the trench. At least a portion of the second nonmagnetic layer is removed using at least a second etch, such as a wet etch process. The etch stop layer is resistant to the at least the second etch. A half side shield is provided on at least part of the first nonmagnetic layer. The half side shield bottom is between the top and the bottom of the main pole.
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